Research Engineer / Senior Research Engineer ─ BEOL Furnaces, (APM), IME

A*STAR - Agency for Science, Technology and Research · singapore, singapore, Singapore

Location
singapore
Job Type
Full-time
Posted
July 08, 2026

Job Description

Job Description

We are looking for a motivated Research & Technical Support Engineer/Scientist to develop, maintain, and support BEOL furnace processes, including BEOL metal anneal, barrier/liner engineering, dielectric curing, hydrogen anneals, and stress‑relief treatments. This role involves both fundamental materials science and hands‑on tool/process ownership in a cleanroom research environment. You will collaborate with R&D teams working on advanced interconnect technologies, photonic integration, 3D integration, and novel dielectric/metallization schemes.

Job Responsibilities BEOL Furnace Process Development
  • Develop and optimize BEOL thermal processes including Metal anneal, Barrier/liner stabilization, Dielectric curing, Passivation and Stress‑relief anneals
  • Perform tool qualification, recipe loading, chamber matching, SPC set up and contamination monitoring.
  • Troubleshoot process excursions and ensure stable operations...

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